JPH0632667Y2 - 薄膜コンデンサ - Google Patents
薄膜コンデンサInfo
- Publication number
- JPH0632667Y2 JPH0632667Y2 JP1986010746U JP1074686U JPH0632667Y2 JP H0632667 Y2 JPH0632667 Y2 JP H0632667Y2 JP 1986010746 U JP1986010746 U JP 1986010746U JP 1074686 U JP1074686 U JP 1074686U JP H0632667 Y2 JPH0632667 Y2 JP H0632667Y2
- Authority
- JP
- Japan
- Prior art keywords
- lower electrode
- upper electrode
- thin film
- electrode
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 20
- 239000003990 capacitor Substances 0.000 title claims description 18
- 239000010408 film Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 5
- 238000000059 patterning Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010746U JPH0632667Y2 (ja) | 1986-01-28 | 1986-01-28 | 薄膜コンデンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986010746U JPH0632667Y2 (ja) | 1986-01-28 | 1986-01-28 | 薄膜コンデンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62124834U JPS62124834U (en]) | 1987-08-08 |
| JPH0632667Y2 true JPH0632667Y2 (ja) | 1994-08-24 |
Family
ID=30797329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986010746U Expired - Lifetime JPH0632667Y2 (ja) | 1986-01-28 | 1986-01-28 | 薄膜コンデンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632667Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6697676B2 (ja) * | 2016-06-22 | 2020-05-27 | 株式会社村田製作所 | キャパシタ |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313601Y2 (en]) * | 1973-05-24 | 1978-04-12 |
-
1986
- 1986-01-28 JP JP1986010746U patent/JPH0632667Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62124834U (en]) | 1987-08-08 |
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